Pressure Sensor Elements (Dies)
SCB10H
- Size 1.4 x 1.4 x 0.85 mm (w x l x h)
- High pressure shock survival (> 200 bar)
- High insulation resistance (> 10 GΩ)
- RoHS compliant
- Various pressure ranges possible (1.2 - 25 bar)
- Proven capacitive 3D-MEMS technology
-
Operates at near vacuum applications
Benefits:
- Extremely low current consumption
- High accuracy
- High capacitance dynamics
- High overpressure and shock durability
Applications:
- Medical devices
- Flow meters
- Barometers
- Altimeters
| Parameter | Unit | B012 | B080 | B250 |
|---|---|---|---|---|
| Measuring range | kPa | 30-120 | 100-800 | 100-2500 |
| Capacitance at min. pressure | pF | 7.8 | 7.5 | 7.3 |
| Capacitance at max. pressure | pF | 11.8 | 13.4 | 13.9 |
| Capacitance dynamics | pF | 4.0 | 5.9 | 6.6 |
| Sensitivity | fF/kPa |
55 (@100 kPa) |
6.2 (@350 kPa) |
1.3 (@100 kPa)6.5 (@2500 kPa) |
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