Acceleration Elements (Dies)
SCG12S and SCG14S
Vertical accelerometer sensors (dies)
- Vertical (z-axis) accelerometers
- Size 3 mm x 2.12 mm x 1.95 or 1.25 mm
- 20 000 g shock survival
- Various measuring ranges possible (1 - 12g)
- Proven capacitive 3D-MEMS Technology
- RoHS compliant
SCG10X and SCG10Z
Horizontal accelerometer sensors (dies)
- Horizontal accelerometers
- Size SCG10X: 2.55 mm x 2.95 mm x 1.91 mm
- Size SCG10Z: 1.50 mm x 1.70 mm x 1.83 mm
- 20 000 g shock survival
- Various measuring ranges possible (1 - 12g)
- Proven capacitive 3D-MEMS Technology
- RoHS compliant
Benefits:
- Small size
- Extremely low current consumption enabled
- High accuracy
- High capacitance dynamics
-
High shock endurance
Applications:
- Acceleration measurement
- Inclination measurement
- Vibration measurement
- Motion measurement
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MEMS Technology
Murata's silicon capacitive sensors are made of single crystal silicon and glass. These materials ensure exceptional reliability, unprecedented accuracy and excellent stability over time and temperature.
